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1. Equipment Overview:

The horizontal diffusion furnace system can be applied in various fields such as integrated circuits, discrete devices, POWER, MEMS, etc. It is suitable for oxidation, diffusion, GPP, annealing, and alloying processes on 4-8 inch silicon wafers.

The annealing process is conducted under medium to low-temperature conditions by introducing inert gas (N2) to eliminate crystal defects and lattice damage at the wafer interface, thereby optimizing the interface quality of the wafer.

2. Equipment Parameters and Types:

3. Main Features and Advantages of the Equipment

1★ Powerful operational capabilities with a Windows-based interface and display screen, allowing users to conveniently modify process control parameters and monitor various process statuses in real-time. Equipped with fault self-diagnosis software, significantly reducing maintenance time.

2★ Utilizes a reliable industrial computer + PLC mode for fully automated control of furnace temperature, boat movement, gas flow, and valves, achieving full automation of the entire process.

3★ The program supports manual/automatic operation. After power failure or mid-process shutdown, restarting allows manual temperature ramping based on the process, saving process time.

4★ Features multiple process pipelines for user convenience.

5★ The cold end adopts PT100 for ambient temperature detection and compensation, avoiding the impact of ambient temperature changes on furnace temperature and preventing interlayer interference.

6★ The boat control employs high-speed pulse closed-loop control to prevent motor step loss and operational vibration. After completing a cycle, the boat automatically calibrates its position, effectively preventing positioning deviation.

7★ Precise gas flow control with analog signal closed-loop control, strong and weak electrical separation, and standard bus for data exchange to enhance anti-interference capability and ensure data safety. Gas activation features a soft-start function.

8★ Includes multiple alarm functions and safety protection features.
9★ Automatic adjustment of the constant temperature zone, cascade control, and precise control of the actual process temperature in the reaction tube.