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Indium phosphide polycrystalline synthesis furnace

○ Product Details

1. Equipment Overview:

Mainly used in 3-6 inch indium phosphide, gallium phosphide III-V compound semiconductor crystal material polycrystalline synthesis process and automatic control system.

2. Equipment parameter type:

Equipment Performance Indicators

1

Operation Mode

Manual

2

Number of Tubes

1 Tube

3

Processed Wafer Size

4-6 Inch

4

Applicable Process

Polycrystalline Synthesis

5

Process Temperature Range

800-1250℃

6

Constant Temperature Zone Length

300-800mm

7

Temperature Control Accuracy

±0.2℃/>1280℃ within the constant temperature zone

8

Single point temperature stability

±0.2℃

9

Temperature Calibration Function

With pre-written deviation value fast temperature pull zone function

10

Feeding and discharging method

Manual

11

Temperature Control Mode

Spike Temperature Control

12

Number of Temperature Control Points

>7 o'clock

13

Vacuum unit:

Directly connected pump

14

System vacuum limit:

<10Pa 

25

Pumping speed:

The time to reach the ultimate vacuum is less than 10 minutes.

16

High pressure chamber design pressure

≤5MPa

17

Working pressure range:

10 mTorr~500 mTorr adjustable

18

Control System Structure

Integrated Industrial Computer + PLC

19

Alarm Protection:

With over-temperature alarm, over-pressure alarm, broken alarm, gas interlock, gas slow start and other functions


3. Main features and advantages of the equipment

1★With powerful operation functions, windows interface, display screen operation, users can easily modify process control parameters and display various process states at any time; equipped with fault self-diagnosis software, which can greatly save maintenance time;

2★Adopt high-reliability industrial computer + PLC mode to fully automatically control furnace temperature, gas flow, valves, etc., and realize the automation of the entire process;

3★The program can realize manual/automatic operation. After power failure or mid-stop, the temperature can be manually increased according to the process when restarted, saving process time;

4★The gas flow is precisely controlled by a high-pressure valve, using analog signal closed-loop control, strong and weak electricity are separated, and the gas is opened with a slow start function;

5★With multiple alarm functions and safety protection functions;
6★The constant temperature zone is automatically adjusted to accurately control the actual process temperature of the reaction tube;


○ Company Profile

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Qingdao Yuhao Microelectronics Equipment Co., Ltd. was established in 2008 as a high-tech enterprise integrating R&D, manufacturing, and sales. The company specializes in electric heating furnace equipment, heating furnace thermal fields, and graphite tool processing. Our products and services cater to various industries including electronic components, semiconductor materials, and solar photovoltaic sectors.

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Yuhao is a national high-tech enterprise and a provincial specialized and innovative SME. We hold trademark registration rights and import/export operation licenses, having passed ISO9001 quality management system certification with over 50 patents.

○ Company Certifications

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